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Modeling and Model Reduction for Control and Optimization of Epitaxial Growth in a Commercial Rapid Thermal Chemical Vapor Deposition Reactor

Newman, Andrew J.; Krishnaprasad, Perinkulam S.; Ponczak, Sam; Brabant, Paul (1998)

In December 1996, a project was initiated at the Institute for Systems Research (ISR), under an agreement between Northrop GrummanElectronic Sensors and Systems Division (ESSD) and the ISR, to investigatethe epitaxial ...

Computation for Nonlinear Balancing

Newman, Andrew J.; Krishnaprasad, Perinkulam S. (1998)

We illustrate a computational approach to practicalnonlinear balancing via the forced damped pendulum example.