Search
Now showing items 1-1 of 1
Modeling and Model Reduction for Control and Optimization of Epitaxial Growth in a Commercial Rapid Thermal Chemical Vapor Deposition Reactor
(1998)
In December 1996, a project was initiated at the Institute for Systems Research (ISR), under an agreement between Northrop GrummanElectronic Sensors and Systems Division (ESSD) and the ISR, to investigatethe epitaxial ...