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The Set-Valued Run-to-Run Controller with Ellipsoid Approximation
In order to successfully apply Run-to-Run (RtR) control or real time control ina semiconductor process, it is very important to estimate the processmodel. Traditional semiconductor process control methods neglect theimportance ...
Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes
Run-to Run (RtR) control plays an important role in semiconductor manufacturing.<p>In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoidapproximation are compared with other RtR ...