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Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...
A Computational Framework for Boundary-Value Problem Based Simulations
A framework is presented for step-by-step implementation of weighted-residualmethods (MWR) for simulations that require the solution ofboundary-value problems. A set of Matlab-based functions ofthe computationally common ...