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Modeling and Reduction with Applications to Semiconductor Processing
This thesis consists of several somewhat distinct but connected parts, withan underlying motivation in problems pertaining to control and optimizationof semiconductor processing. The first part (Chapters 3 and 4) ...
Computing Balanced Realizations for Nonlinear Systems
This paper addresses the problem of computability pertaining to the Scherpen(1994) theory and procedure for balancing of nonlinear systems. In contrastto Moore's (1981) balancing method for linear systems, the Scherpen ...
Nonlinear Model Reduction for RTCVD
In this paper, we examine alternative methods for reducing thedimensionality of nonlinear dynamical system models arising incontrol of rapid thermal chemical vapor deposition (RTCVD) forsemiconductor manufacturing. We focus ...
Computation for Nonlinear Balancing
We illustrate a computational approach to practicalnonlinear balancing via the forced damped pendulum example.