Now showing items 1-6 of 6
Real-Time Growth Rate Metrology for a Tungsten CVD Process by Acoustic Sensing
An acoustic sensor, the Leybold Inficon ComposerTM, was implemented downstream to a production-scale tungsten chemical vapor deposition (CVD) cluster tool for in-situ process sensing. Process gases were sampled at the ...
A Feature Based Approach to Automated Design of Multi-Piece Sacrificial Molds
This report describes a feature-based approach to automated design of multi-piece sacrificial molds. We use multi-piece sacrificial molds to create complex 3D polymer/ceramic parts. Multi-piece molds refer to molds that ...
Randomized Difference Two-Timescale Simultaneous Perturbation Stochastic Approximation Algorithms for Simulation Optimization of Hidden Markov Models
We proposetwo finite difference two-timescale simultaneous perturbationstochastic approximation (SPSA)algorithmsfor simulation optimization ofhidden Markov models. Stability and convergence of both thealgorithms is ...
Improving Cluster Tool Performance by Finding the Optimal Sequence and Cyclic Sequence of Wafer Handler Moves
The research aims to develop algorithms that can minimize the total lot processing time (makespan) of cluster tools used for semiconductor manufacturing. Previous research focuses on finding an optimal sequence of wafer ...
Comparing Gradient Estimation Methods Applied to Stochastic Manufacturing Systems
This paper compares two gradient estimation methods that can be usedfor estimating the sensitivities of output metrics with respectto the input parameters of a stochastic manufacturing system.A brief description of the ...
Sensitivity Analysis and Discrete Stochastic Optimization for Semiconductor Manufacturing Systems
The semiconductor industry is a capital-intensive industry with rapid time-to-market, short product development cycles, complex product flows and other characteristics. These factors make it necessary to utilize equipment ...