Now showing items 1-2 of 2
An Orthogonal Collocation Technique for Rapid Thermal Processing System Discretization
A model of a multiple heating zone Rapid Thermal Processing (RTP) system is developed to study wafer thermal dynamics during a processing cycle. The system is discretized with trial functions generated from the linearized ...
Spectral Filtering for Improved Performance of Collocation Discretization Methods
Spectral filtering methods are investigated for use in reducing the Gibbs oscillations that result when discontinuous functions are projected onto globally definedtrial function expansions. Several physical-space filters ...