Now showing items 1-4 of 4
Modeling and Model Reduction for Control and Optimization of Epitaxial Growth in a Commercial Rapid Thermal Chemical Vapor Deposition Reactor
In December 1996, a project was initiated at the Institute for Systems Research (ISR), under an agreement between Northrop GrummanElectronic Sensors and Systems Division (ESSD) and the ISR, to investigatethe epitaxial ...
Computing Balanced Realizations for Nonlinear Systems
This paper addresses the problem of computability pertaining to the Scherpen(1994) theory and procedure for balancing of nonlinear systems. In contrastto Moore's (1981) balancing method for linear systems, the Scherpen ...
Nonlinear Model Reduction for RTCVD
In this paper, we examine alternative methods for reducing thedimensionality of nonlinear dynamical system models arising incontrol of rapid thermal chemical vapor deposition (RTCVD) forsemiconductor manufacturing. We focus ...
Computation for Nonlinear Balancing
We illustrate a computational approach to practicalnonlinear balancing via the forced damped pendulum example.