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Nonlinear Model Reduction for RTCVD
In this paper, we examine alternative methods for reducing thedimensionality of nonlinear dynamical system models arising incontrol of rapid thermal chemical vapor deposition (RTCVD) forsemiconductor manufacturing. We focus ...
Computation for Nonlinear Balancing
We illustrate a computational approach to practicalnonlinear balancing via the forced damped pendulum example.