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Integration of Benzocyclobutene Polymers and Silicon Micromachined Structures Fabricated with Anisotropic Wet Etching
(2005-03-15)
Integration of low dielectric constant Benzocyclobutene (BCB) film with deep etched structures in silicon allows the fabrication of MEMS devices with low parasitic loss. A fabrication process is developed for integration ...
Design, Fabrication, and Characterization of a Rotary Variable-Capacitance Micromotor Supported on Microball Bearings
(2007-07-31)
The design, fabrication, and characterization of a rotary micromotor supported on microball bearings are reported in this dissertation. This is the first demonstration of a rotary micromachine with a robust mechanical ...