Now showing items 1-2 of 2
Closed-Loop Control of a Micropositioner Using Integrated Photodiode Sensors
A closed-loop control system with photodiode position sensors has been implemented in a microball bearing supported linear electrostatic micromotor to improve accuracy and reliability. The fabrication sequence of the ...
AN INTEGRATED ELECTROMAGNETIC MICRO-TURBO-GENERATOR SUPPORTED ON ENCAPSULATED MICROBALL BEARINGS
This dissertation presents the development of an integrated electromagnetic micro-turbo-generator supported on encapsulated microball bearings for electromechanical power conversion in MEMS (Microelectromechanical Systems) ...