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dc.contributor.advisorMurphy, Thomas Een_US
dc.contributor.authorKim, Kyowonen_US
dc.date.accessioned2016-02-06T06:34:54Z
dc.date.available2016-02-06T06:34:54Z
dc.date.issued2015en_US
dc.identifierhttps://doi.org/10.13016/M2BQ5W
dc.identifier.urihttp://hdl.handle.net/1903/17235
dc.description.abstractIn this thesis, we investigate the optical and thermal properties of porous silicon and its applications. In first part, porous silicon's optical properties and application as a highly sensitive refractive index sensor is studied. An integrated Mach-Zehnder interferometer waveguide fabricated from nanoporous silicon is shown to exhibit high sensitivity and measurement stability that exceeds previously demonstrated porous sensors. In second part, we discuss experimental methods to characterize the thermal conductivity of nanoporous silicon films. We use the 3-ω method to characterize the exceptionally low thermal conductivity of porous silicon. Finally, we employ an improved heat conduction analysis method for the 3-ω method to measure the anisotropy in thermal conductivity. Our measurement show that porous silicon has very low in-plane thermal conductivity compared to cross-plane conductivity. We confirmed this anisotropy using direct numerical simulation of the anisotropic heat equation.en_US
dc.language.isoenen_US
dc.titleOptical and Thermal Properties of Nanoporous Material and Devicesen_US
dc.typeDissertationen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.contributor.departmentElectrical Engineeringen_US
dc.subject.pqcontrolledNanotechnologyen_US
dc.subject.pqcontrolledOpticsen_US
dc.subject.pqcontrolledMaterials Scienceen_US
dc.subject.pquncontrolledAnisotropyen_US
dc.subject.pquncontrolledNanoscale Materialsen_US
dc.subject.pquncontrolledOptical Sensorsen_US
dc.subject.pquncontrolledSiliconen_US
dc.subject.pquncontrolledThermal Conductivityen_US
dc.subject.pquncontrolledWaveguideen_US


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