Theses and Dissertations from UMD

Permanent URI for this communityhttp://hdl.handle.net/1903/2

New submissions to the thesis/dissertation collections are added automatically as they are received from the Graduate School. Currently, the Graduate School deposits all theses and dissertations from a given semester after the official graduation date. This means that there may be up to a 4 month delay in the appearance of a give thesis/dissertation in DRUM

More information is available at Theses and Dissertations at University of Maryland Libraries.

Browse

Filters

20232

Settings

Subject: search.filters.subject.vacuum

Search Results

Now showing 1 - 2 of 2
  • Thumbnail Image
    Item
    PERFORMANCE ENHANCEMENTS OF MICRO CORIOLIS VIBRATORY GYROSCOPES THROUGH LINEARIZED TRANSDUCTION AND TUNING MECHANISMS
    (2023) Knight, Ryan; DeVoe, Don L; Mechanical Engineering; Digital Repository at the University of Maryland; University of Maryland (College Park, Md.)
    A quadruple mass Microelectromechanical System (MEMS) Coriolis vibratory gyroscope has been re-engineered with the singular focus of minimizing nonlinear transduction mechanisms, thereby allowing for angle random walk (ARW) noise reduction when operating at amplitudes higher than 2 μm. The redesign involved six primary steps: (i) the creation of an aspect-ratio independent deep reactive ion etch with minimal notching on 100 μm thick silicon-on-insulator device layer, (ii) the creation of micro-torr vacuum packaging capability, enabling operation at the thermoelastic dissipation limit of silicon, (iii) the redesign of Coriolis mass folded flexures and shuttle springs, (iv) the linearization of the antiphase coupler spring rate while maintaining parasitic modal separation, (v) the substitution of parallel plate transducers with linear combs, and (vi) the implementation of dedicated force-balanced electrostatic frequency tuners. Cross-axis stiffness is also reduced through folded-flexure moment balancing to further reduce ARW. By balancing positive and negative Duffing frequency contributions, net fractional frequency nonlinearity was reduced to -20 ppm. The gyroscope presented in this research has achieved, a first reported of its kind, an ARW of 0.0005 °/√hr, with an uncompensated bias instability of 0.08 °/hr. These advancements hold promise for enhancing navigation and North-finding applications. In tandem with gyroscope performance enhancements, vacuum packaging of ceramic chip carrier physics packages has achieved pressure levels below 1 micro-torr, a first in the field and remains state-of-the-art. Besides high-performance MEMS inertial sensors, ultrahigh vacuum packaging proves beneficial for chip scale atomic clocks, which require micro-torr vacuum levels to maintain fractional frequencies less than 10^-12. Finally, an approach to tuning the quality factor mismatch between degenerate modes in as-fabricated gyroscopes has demonstrated a reduction in gyroscope bias instability. This tuning can be achieved by incorporating lead zirconate titanate into regions where the trade-off between mechanical Q, tuning Q, and bias instability reduction is balanced. Both modeling and empirical frequency data justify this approach, suggesting, for typical MEMS foundry Q mismatch of 7%, a 70× reduction in bias instability.
  • Thumbnail Image
    Item
    Development of the Cold Atom Vacuum Standard
    (2023) Scherschligt, Julia; Porto, Trey; Rolston, Steven; Physics; Digital Repository at the University of Maryland; University of Maryland (College Park, Md.)
    We describe the inception, design, development, and initial results of The Cold Atom Vacuum Standard (CAVS). It has been known for many years that vacuum level limits the lifetime of a cold atom cloud; we invert this to create a vacuum pressure measurement tool based on the trapped cloud lifetime. The difference between a standard and a sensor is of great concern to metrologists: a primary standard defines a unit, and a sensor transduces it. To have a device capable of both functions is to have a calibration-free measurement tool, which is of interest to many stakeholders in academia, industry, and defense. We describe all aspects of construction of the CAVS, including a lengthy investigation of vacuum technology. We ultimately demonstrate that the device is traceable to pressure through the fundamental physics of collision cross sections, thereby elevating it to status as not just a sensor, but a standard.