UMD Theses and Dissertations

Permanent URI for this collectionhttp://hdl.handle.net/1903/3

New submissions to the thesis/dissertation collections are added automatically as they are received from the Graduate School. Currently, the Graduate School deposits all theses and dissertations from a given semester after the official graduation date. This means that there may be up to a 4 month delay in the appearance of a given thesis/dissertation in DRUM.

More information is available at Theses and Dissertations at University of Maryland Libraries.

Browse

Filters

20101

Settings

Author: search.filters.author.Yesilkoy, FilizSubject: search.filters.subject.dose modulation

Search Results

Now showing 1 - 1 of 1
  • Thumbnail Image
    Item
    Implementation of E-Beam Proximity Effect Correction Using Linear Programming Techniques for the Fabrication of Asymmetric Bow-Tie Antennas
    (2010) Yesilkoy, Filiz; Peckerar, Martin; Electrical Engineering; Digital Repository at the University of Maryland; University of Maryland (College Park, Md.)
    Asymmetric nano-bow-tie antennas offer the possibility of direct light-to-electrical energy conversion. These nano-antennas are easily integrated with conductor-barrier-conductor (CBC) tunnel junctions in between the antenna segments for the purpose of coupled signal rectification. The architecture of the tunnel junction together with the antenna size precision require nano-scale patterning accuracy. Electron Beam Lithography (EBL) is used for patterning purposes. In this study Proximity Effect (PE), a very common resolution problem in EBL, is reduced by a dose modulation technique employing linear programming (LP) algorithms. Production of tightly controlled antenna segment dimensions is achieved in conjunction with a small area tip and a small tunnel junction gap. It is expected that precise control of the gap geometry will enhance detection speed, enabling the utilization of the device for the visible range energy harvest purposes.