Now showing items 1-2 of 2
Design, Fabrication, and Characterization of a Rotary Variable-Capacitance Micromotor Supported on Microball Bearings
The design, fabrication, and characterization of a rotary micromotor supported on microball bearings are reported in this dissertation. This is the first demonstration of a rotary micromachine with a robust mechanical ...
Integration of Benzocyclobutene Polymers and Silicon Micromachined Structures Fabricated with Anisotropic Wet Etching
Integration of low dielectric constant Benzocyclobutene (BCB) film with deep etched structures in silicon allows the fabrication of MEMS devices with low parasitic loss. A fabrication process is developed for integration ...